Sheng-Kai Yeh

CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs

Ya-Chu Lee, Meng-Lin Hsieh, Pen-Sheng Lin et al. · Journal of Micromechanics and Microengineering · 2021 · 37 citations

Electrical Engineering, Cmos Chips, Engineering +15

Inductive Micro Tri-Axial Tactile Sensor Using a CMOS Chip With a Coil Array

Sheng-Kai Yeh, Weileun Fang · IEEE Electron Device Letters · 2019 · 30 citations

Stainless Steel Sheet, Engineering, Mechanical Engineering +18

Development of CMOS MEMS inductive type tactile sensor with the integration of chrome steel ball force interface

Sheng-Kai Yeh, Heng-Chung Chang, Weileun Fang · Journal of Micromechanics and Microengineering · 2018 · 26 citations

Engineering, Chrome Steel Ball, Microactuator +19

CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement

Meng-Lin Hsieh, Sheng-Kai Yeh, Jia-Horng Lee et al. · Sensors and Actuators A Physical · 2020 · 24 citations

Tactile Sensing, Electrical Engineering, Engineering +9

Monolithic Integration of Pressure/Humidity/Temperature Sensors for CMOS-Mems Environmental Sensing Hub with Structure Designs for Performances Enhancement

Yung-Chian Lin, Ping-Hsiu Hong, Sheng-Kai Yeh et al. · 2020 · 21 citations

Engineering, Low Cost Sensor, Sensor Interface +21