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CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement

Tactile SensingElectrical EngineeringEngineeringImplantable SensorSensitivity EnhancementNano Electro Mechanical SystemSensor DesignBiomedical EngineeringElectrode ArrayMicroelectronicsSensor TechnologyMicro-electromechanical System