6
Publications
175
Citations
6
H-Index
1979
Active since
Affiliations
David W. Woodruff is an author at General Electric (United States) specializing in engineering, surface science, and materials science.
Top concepts
EngineeringSurface ScienceMaterial ScienceApplied PhysicsMaterials EngineeringMicroelectronicsElectronic PackagingElectrical EngineeringChemistryThermodynamics
Publications per year
1979–1988
6
6
Selective CVD tungsten via plugs for multilevel metallization
D.M. Brown, B. Gorowitz, P. A. Piacente et al. · 1986 · 13 citations
Engineering, Metal Interconnection Pitch, Integrated Circuits +19
Rows per page
1–5 of 6