Concepedia

V.K. Mathews

VM

Statistics

Publications

10

Citations

207

H-Index

10

Active since

1989

Affiliations

Micron (United States)(Current)

The University of Texas at Austin

V.K. Mathews is an author at Micron (United States) specializing in materials science, engineering, and semiconductor devices.

Publications per year

1989–2002

10

Publications

10

Highly reliable, high-C DRAM storage capacitors with CVD TA/sub 2/O/sub 5/ films on rugged polysilicon

G. Q. Lo, D. L. Kwong, P. Fazan et al. · IEEE Electron Device Letters · 1993 · 37 citations

, , +17

Dishing effects in a chemical mechanical polishing planarization process for advanced trench isolation

Chao Yu, P. Fazan, V.K. Mathews et al. · Applied Physics Letters · 1992 · 32 citations

, , +17

Highly reliable SiO/sub 2//Si/sub 3/N/sub 4/ stacked dielectric on rapid-thermal-nitrided rugged polysilicon for high-density DRAM's

G. Q. Lo, Seiichi Ito, Dim‐Lee Kwong et al. · IEEE Electron Device Letters · 1992 · 23 citations

, , +17

A highly manufacturable trench isolation process for deep submicron DRAMs

P. Fazan, V.K. Mathews · 2002 · 21 citations

, , +9

Effects of post-deposition annealing on the electrical properties and reliability of ultrathin chemical vapor deposited Ta/sub 2/O/sub 5/ films

Giwan Yoon, D. L. Kwong, V.K. Mathews et al. · IEEE Electron Device Letters · 1994 · 20 citations

, , +17

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