Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators

Mingyo Park, Zhijian Hao, Rytis Dargis, +2

Journal of Microelectromechanical Systems

Materials ScienceSuper High FrequencyEngineeringElectronic MaterialsPhysical Acoustic +10

Introducing crystalline rare‐earth oxides into Si technologies

H. J. Osten, Apurba Laha, M. Czernohorsky, +3

physica status solidi (a)

Materials EngineeringSemiconductorsMaterials ScienceElectrical EngineeringOxide Heterostructures +13

Strain relaxation in single crystal SrTiO3 grown on Si (001) by molecular beam epitaxy

Miri Choi, Agham Posadas, Rytis Dargis, +7

Journal of Applied Physics

Materials ScienceEpitaxial GrowthEngineeringPhysicsNanoelectronics +9

A 10 GHz Single-Crystalline Scandium-Doped Aluminum Nitride Lamb-Wave Resonator

Mingyo Park, Zhijian Hao, Dea Gyu Kim, +3

Materials ScienceAluminium NitrideAluminum NitrideSingle-crystalline ScandiumEngineering +9

Single‐Crystal Multilayer Nitride, Metal, and Oxide Structures on Engineered Silicon for New‐Generation Radio Frequency Filter Applications

Rytis Dargis, Andrew Clark, Azadeh Ansari, +7

physica status solidi (a)

Crystal StructureEngineeringAcoustic MetamaterialSc ConcentrationRf Semiconductor +14

Stability of crystalline Gd₂O₃thin films on silicon during rapid thermal annealing

M. Czernohorsky, Dominic Tetzlaff, E. Bugiel, +6

Semiconductor Science and Technology

EngineeringThin Film Process TechnologySilicon On InsulatorEpitaxial GrowthThin Film Processing +14

Crystal structure and strain state of molecular beam epitaxial grown Gd₂O₃on Si(1 1 1) substrates: a diffraction study

J X Wang, Apurba Laha, A. Fissel, +7

Semiconductor Science and Technology

Materials ScienceMaterials EngineeringCrystal StructureEngineeringPhysics +13

Structural and Thermal Properties of Single Crystalline Epitaxial Gd₂O₃and Er₂O₃Grown on Si(111)

Rytis Dargis, David L. Williams, Robin S. Smith, +4

ECS Journal of Solid State Science and Technology

Materials ScienceSemiconductorsEpitaxial GrowthEngineeringPhysics +11

Single Crystalline ScAlN Surface Acoustic Wave Resonators with Large Figure of Merit (Q × kₜ²)

Zhijian Hao, Mingyo Park, Dea Gyu Kim, +4

Materials ScienceAcoustic MethodsOptical MaterialsSurface Acoustic WaveEngineering +13

Super High-Frequency Scandium Aluminum Nitride Crystalline Film Bulk Acoustic Resonators

Mingyo Park, Jialin Wang, Rytis Dargis, +2

Optical MaterialsEngineeringAcoustic MetamaterialMetamaterialsPhysical Acoustic +14