Concepedia

Jarmo Skarp

JS

Statistics

Publications

12

Citations

864

H-Index

11

Active since

1983

Affiliations

Beneq (Finland)(Current)

National Laboratory of the Rockies

Aalto University

Tieto (Finland)

University of Helsinki

Jarmo Skarp is an author at Beneq (Finland) specializing in materials science, materials engineering, and electronic materials.

Publications per year

1983–2013

12

Publications

12

Perfectly Conformal TiN and Al2O3 Films Deposited by Atomic Layer Deposition

Mikko Ritala, Markku Leskelä, Jan-Pieter Dekker et al. · Chemical Vapor Deposition · 1999 · 298 citations

Natural Sciences, Materials Engineering, Materials Science +14

Atomic layer epitaxy growth of doped zinc oxide thin films from organometals

Vesa Lujala, Jarmo Skarp, Markku Tammenmaa et al. · Applied Surface Science · 1994 · 185 citations

Natural Sciences, Materials Engineering, Materials Science +14

Dependence of atomic layer-deposited Al2O3 films characteristics on growth temperature and Al precursors of Al(CH3)3 and AlCl3

Sun Jin Yun, Kyungho Lee, Jarmo Skarp et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 126 citations

Natural Sciences, Materials Engineering, Materials Science +17

Properties of Al2O3-films deposited on silicon by atomic layer epitaxy

Per Ericsson, Stefan Bengtsson, Jarmo Skarp · Microelectronic Engineering · 1997 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +12

Silicon Surface Passivation by Al2O3: Effect of ALD Reactants

Päivikki Repo, H. Talvitie, Shuo Li et al. · Energy Procedia · 2011 · 41 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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