Concepedia
Statistics
Publications
1
Citations
39
H-Index
Active since
2022
Affiliations
IMEC(Current)
Gosia Jurczak is an author at IMEC specializing in materials engineering, alloys, and metal materials.
Publications per year
2022–2022
Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below
Stefan Decoster, Elisabeth Camerotto, Gayle Murdoch et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2022 · 39 citations
Engineering, Materials Engineering, Materials Science +17
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