Concepedia

Dmitry Astakhov

DA

Statistics

Publications

10

Citations

251

H-Index

10

Active since

2015

Affiliations

Institute of Spectroscopy(Current)

ASML (Netherlands)

Moscow Institute of Physics and Technology

ISTEQ (Netherlands)

EUV Labs (Russia)

Dmitry Astakhov is an author at Institute of Spectroscopy specializing in physics, natural sciences, and plasma physics.

ORCID

Publications per year

2015–2024

10

Publications

10

EUV-Induced Plasma: A Peculiar Phenomenon of a Modern Lithographic Technology

J. Beckers, T. H. M. van de Ven, R M van der Horst et al. · Applied Sciences · 2019 · 64 citations · Full text

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Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen

R M van der Horst, J. Beckers, E A Osorio et al. · Journal of Physics D Applied Physics · 2016 · 42 citations · Full text

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EUV-induced hydrogen plasma and particle release

Mark van de Kerkhof, Andrei M. Yakunin, Vladimir Kvon et al. · Radiation effects and defects in solids · 2022 · 34 citations · Full text

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Measurements of hydrogen gas stopping efficiency for tin ions from laser-produced plasma

D. B. Abramenko, Maxim Spiridonov, Pavel Krainov et al. · Applied Physics Letters · 2018 · 28 citations · Full text

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Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the Institute of Spectroscopy, Russian Academy of Sciences)

D. B. Abramenko, P. S. Antsiferov, Dmitry Astakhov et al. · Physics-Uspekhi · 2018 · 20 citations

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