T. H. M. van de Ven

EUV-Induced Plasma: A Peculiar Phenomenon of a Modern Lithographic Technology

J. Beckers, T. H. M. van de Ven, R M van der Horst et al. · Applied Sciences · 2019 · 60 citations · Full text

Materials Science, Optical Materials, Engineering +13

Ion energy distributions in highly transient EUV induced plasma in hydrogen

T. H. M. van de Ven, P. Reefman, C. A. de Meijere et al. · Journal of Applied Physics · 2018 · 49 citations · Full text

Engineering, Plasma Science, Plasma Physics +18

Mass Spectrometry Study of the Temperature Dependence of Pt Film Growth by Atomic Layer Deposition

Ivo Erkens, Adriaan J. M. Mackus, Harm C. M. Knoops et al. · ECS Journal of Solid State Science and Technology · 2012 · 33 citations · Full text

Analysis of retarding field energy analyzer transmission by simulation of ion trajectories

T. H. M. van de Ven, C. A. de Meijere, R M van der Horst et al. · Review of Scientific Instruments · 2018 · 33 citations · Full text

Electrical Engineering, Engineering, Physics +15

Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas

J. Beckers, T. H. M. van de Ven, C. A. de Meijere et al. · Applied Physics Letters · 2019 · 13 citations · Full text

Euv-induced Plasmas, Engineering, Physics +14