Concepedia

J. Y. Chen

JY

2

Publications

46

Citations

2

H-Index

1999

Active since

Affiliations

National Tsing Hua University(Current)

J. Y. Chen is an author at National Tsing Hua University specializing in applied physics, surface science, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial SciencePhysicsChemistryThin FilmsNanomaterialsNanotechnologyNanoelectronics

Publications per year

1999–2005

2

Publications

2

Effects of nitrogen ion implantation on the formation of nickel silicide contacts on shallow junctions

S. L. Cheng, J. Y. Chen, L.J Chen et al. · Thin Solid Films · 1999 · 30 citations

Materials Science, Shallow Junctions, Ion Implantation +8

Thermal stability of trimethylsilylated mesoporous silica thin films as the ultralow-k dielectric for copper interconnects

J. Y. Chen, Fu‐Ming Pan, A. T. Cho et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 16 citations

Engineering, Nanoporous Material, Surface Nanotechnology +25

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