Concepedia

A. T. Cho

AT

1

Publications

16

Citations

1

H-Index

2005

Active since

Affiliations

National Tsing Hua University(Current)

A. T. Cho is an author at National Tsing Hua University specializing in nanomaterials, nanotechnology, and chemical engineering.

Top concepts

ChemistryThin FilmsEngineeringNanomaterialsNanotechnologyApplied PhysicsNanoengineeringSurface ScienceHybrid MaterialsMaterial Science

Publications per year

2005–2005

1

Publications

1

Thermal stability of trimethylsilylated mesoporous silica thin films as the ultralow-k dielectric for copper interconnects

J. Y. Chen, Fu‐Ming Pan, A. T. Cho et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 16 citations

Engineering, Nanoporous Material, Surface Nanotechnology +25

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