Concepedia

Stefan Keij

SK

3

Publications

52

Citations

3

H-Index

2005

Active since

Affiliations

ASML (Netherlands)(Current)

Stefan Keij is an author at ASML (Netherlands) specializing in calibration, instrumentation, and engineering.

Top concepts

Publications per year

2005–2019

3

Publications

3

YieldStar: a new metrology platform for advanced lithography control

Jos G. Maas, Martin Ebert, Kaustuve Bhattacharyya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 25 citations

, , +16

Advances in phase-grating-based wafer alignment systems

Stefan Keij, I.D. Setija, Gerbrand van der Zouw et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 17 citations

, , +12

Holistic feedforward control for the 5 nm logic node and beyond

Henry Megens, Ralph Brinkhof, Igor Aarts et al. · 2019 · 10 citations

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