Concepedia

Takuya Futase

TF

3

Publications

39

Citations

3

H-Index

2009

Active since

Affiliations

Hitachi (Japan)(Current)

Renesas Electronics (Japan)

University of Tsukuba

Takuya Futase is an author at Hitachi (Japan) specializing in materials engineering, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMaterials EngineeringMicrostructureNanotechnologyNanoelectronicsMicroelectronicsPhysics

Publications per year

2009–2011

3

Publications

3

Spike Annealing as Second Rapid Thermal Annealing to Prevent Pure Nickel Silicide From Decomposing on a Gate

Takuya Futase, N. Hashikawa, Takeshi Kamino et al. · IEEE Transactions on Semiconductor Manufacturing · 2009 · 18 citations

Oxygen Contamination, Engineering, Chemical Deposition +19

${\rm TiCl}_{4}$ Soak on NiSi: Selective Formation of Pure Sub-Nanometer NiTi to Reduce Contact Resistance

Takuya Futase, N. Hashikawa, H. Yamamoto et al. · IEEE Transactions on Semiconductor Manufacturing · 2010 · 11 citations

Engineering, \Rm Ticl, Pure Sub-nanometer Niti +21

Uniform, Low-Resistive Ni-Pt Silicide Fabricated by Partial Conversion With Low Metal-Consumption Ratio

Takuya Futase, Takeshi Kamino, Yutaka Inaba et al. · IEEE Transactions on Semiconductor Manufacturing · 2011 · 10 citations

Materials Engineering, Materials Science, Engineering +13

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