Jack Kun-Chieh Chen

Statistics

Publications

Citations

196

H-Index

Active since

2014

Affiliations

University of California, Los Angeles(Current)

Lam Research (United States)

Jack Kun-Chieh Chen is an author at University of California, Los Angeles specializing in materials science, natural sciences, and materials engineering.

Publications per year

2014–2017

Publications

Directional etch of magnetic and noble metals. II. Organic chemical vapor etch

Jack Kun-Chieh Chen, Nicholas D. Altieri, Taeseung Kim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 63 citations

Natural Sciences, Materials Engineering, Materials Science +17

Review Article: Plasma–surface interactions at the atomic scale for patterning metals

Nicholas D. Altieri, Jack Kun-Chieh Chen, Luke Minardi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 37 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Directional etch of magnetic and noble metals. I. Role of surface oxidation states

Jack Kun-Chieh Chen, Nicholas D. Altieri, Taeseung Kim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thermodynamic assessment and experimental verification of reactive ion etching of magnetic metal elements

Taeseung Kim, Jack Kun-Chieh Chen, Jane P. Chang · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ion beam assisted organic chemical vapor etch of magnetic thin films

Jack Kun-Chieh Chen, Taeseung Kim, Nicholas D. Altieri et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

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