Concepedia

Gregor Dellemann

GD

3

Publications

127

Citations

3

H-Index

2005

Active since

Affiliations

Carl Zeiss (Germany)(Current)

SUNY Polytechnic Institute

Gregor Dellemann is an author at Carl Zeiss (Germany) specializing in nanotechnology, physics, and applied physics.

Top concepts

PhysicsEngineeringNanotechnologyApplied PhysicsPhotonicsMicroscopyBeamformingFiber OpticsSpectroscopyNanophotonics

Publications per year

2005–2015

3

Publications

3

Midinfrared sensors meet nanotechnology: Trace gas sensing with quantum cascade lasers inside photonic band-gap hollow waveguides

Christy Charlton, Burak Temelkuran, Gregor Dellemann et al. · Applied Physics Letters · 2005 · 78 citations

Photonic Sensor, Optical Materials, Gas Analysis +23

Further advancing the throughput of a multi-beam SEM

Thomas Kemen, Matt Malloy, B. L. Thiel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 26 citations

Engineering, Electron-beam Lithography, Microscopy +19

Massively parallel E-beam inspection: enabling next-generation patterned defect inspection for wafer and mask manufacturing

Matt Malloy, B. L. Thiel, Benjamin Bunday et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 23 citations

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