Concepedia

Wang Nang Wang

WN

2

Publications

29

Citations

2

H-Index

2004

Active since

Affiliations

Physico-Technical Institute(Current)

Russian Academy of Sciences

University of Bath

Wang Nang Wang is an author at Physico-Technical Institute specializing in electrical engineering, applied physics, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceElectrical EngineeringCorrosionMicroelectronicsLaser ApplicationsChemical EngineeringMaterials Engineering

Publications per year

2004–2005

2

Publications

2

Influence of cathode material and SiCl4 gas on inductively coupled plasma etching of AlGaN layers with Cl2∕Ar plasma

Evgeny Zhirnov, Wang Nang Wang, Yu. G. Shreter et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 18 citations

Aluminium Nitride, Engineering, Vacuum Device +19

ICP etching of III-nitride based laser structure with Cl2–Ar plasma assisted by Si coverplate material

Evgeny Zhirnov, A. Gott, Wang Nang Wang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 11 citations

Materials Science, Electrical Engineering, Icp Source +15

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