Concepedia

Evgeny Zhirnov

EZ

3

Publications

57

Citations

3

H-Index

2004

Active since

Affiliations

Physico-Technical Institute(Current)

University of Bath

Russian Academy of Sciences

Evgeny Zhirnov is an author at Physico-Technical Institute specializing in applied physics, engineering, and electrical engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceElectrical EngineeringCorrosionMicroelectronicsLaser ApplicationsChemical EngineeringMaterials Engineering

Publications per year

2004–2005

3

Publications

3

Tunnel-recombination currents and electroluminescence efficiency in InGaN/GaN LEDs

N. I. Bochkareva, Evgeny Zhirnov, A. A. Efremov et al. · Semiconductors · 2005 · 28 citations

Influence of cathode material and SiCl4 gas on inductively coupled plasma etching of AlGaN layers with Cl2∕Ar plasma

Evgeny Zhirnov, Wang Nang Wang, Yu. G. Shreter et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 18 citations

Aluminium Nitride, Engineering, Vacuum Device +19

ICP etching of III-nitride based laser structure with Cl2–Ar plasma assisted by Si coverplate material

Evgeny Zhirnov, A. Gott, Wang Nang Wang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 11 citations

Materials Science, Electrical Engineering, Icp Source +15

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