Statistics
Publications
2
Citations
33
H-Index
2
Active since
2012
Affiliations
Toppan (Japan)(Current)
Yutaka Kodera is an author at Toppan (Japan) specializing in thin film optical properties, materials science, and absorber materials.
Publications per year
2012–2013
2
2
Experimental approach to EUV imaging enhancement by mask absorber height optimization
Natalia Davydova, Robert de Kruif, Haiko Rolff et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +16
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