Concepedia
Statistics
Publications
3
Citations
63
H-Index
Active since
2007
Affiliations
KLA (Israel)(Current)
STMicroelectronics (Switzerland)
IMEC
Qwed (Poland)
STMicroelectronics (Italy)
Irina Vakshtein is an author at KLA (Israel) specializing in calibration, computer engineering, and instrumentation.
Top concepts
EducationMetrologyCalibrationEngineeringMeasurementInstrumentationComputer EngineeringComputational ImagingRadarRadiology
Publications per year
2007–2012
Diffraction based overlay metrology: accuracy and performance on front end stack
Philippe Leray, Shaunee Cheng, Daniel Kandel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 24 citations
Front End Stack, Engineering, Measurement +19
Overlay accuracy fundamentals
Daniel Kandel, Vladimir Levinski, Noam Sapiens et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 22 citations
Differential signal scatterometry overlay metrology: an accuracy investigation
Daniel Kandel, Mike Adel, Berta Dinu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations
Radar, Array Processing, Differential Signal Scatterometry +14
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