N. Shibata

Dielectric SiO2∕ZrO2 distributed Bragg reflectors for ZnO microcavities prepared by the reactive helicon-wave-excited-plasma sputtering method

Shigefusa F. Chichibu, T. Ohmori, N. Shibata et al. · Applied Physics Letters · 2006 · 43 citations

Optical Materials, Engineering, Optoelectronic Devices +21

Greenish-white electroluminescence from p-type CuGaS2 heterojunction diodes using n-type ZnO as an electron injector

Shigefusa F. Chichibu, T. Ohmori, N. Shibata et al. · Applied Physics Letters · 2004 · 34 citations

Materials Science, Gap Substrate, Electrical Engineering +14

Fabrication of p-CuGaS2/n-ZnO:Al heterojunction light-emitting diode grown by metalorganic vapor phase epitaxy and helicon-wave-excited-plasma sputtering methods

Shigefusa F. Chichibu, T. Ohmori, N. Shibata et al. · Journal of Physics and Chemistry of Solids · 2005 · 25 citations

Aluminium Nitride, Electrical Engineering, Helicon-wave-excited-plasma Sputtering Methods +7

Effects of the high-temperature-annealed self-buffer layer on the improved properties of ZnO epilayers grown by helicon-wave-excited-plasma sputtering epitaxy on a-plane sapphire substrates

T. Koyama, A. N. Fouda, N. Shibata et al. · Journal of Applied Physics · 2007 · 12 citations

High Temperature Annealing, Engineering, High-temperature-annealed Self-buffer Layer +20

<i>In situ</i> monitoring of Zn* and Mg* species during helicon-wave-excited-plasma sputtering epitaxy of ZnO and Mg0.06Zn0.94O films

T. Koyama, T. Ohmori, N. Shibata et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 10 citations

Materials Science, Engineering, Nanotechnology +13