Concepedia

Josef Kaindl

JK

Statistics

Publications

4

Citations

74

H-Index

4

Active since

1995

Affiliations

Siemens (Germany)(Current)

Munich University of Applied Sciences

Josef Kaindl is an author at Siemens (Germany) specializing in engineering, electrical engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringInstrumentationOptoelectronicsMicroelectronicsOptical PropertiesPhotonicsSemiconductorsSurface Science

Publications per year

1995–2003

4

Publications

4

Dry Etching of III/V ‐Semiconductors: Fine Tuning of Pattern Transfer and Process Control

Josef Kaindl, S. Sotier, Gerhard Franz · Journal of The Electrochemical Society · 1995 · 35 citations

Optical Materials, Engineering, Electron-beam Lithography +19

Reactive ion etching GaAs and AlAs: Kinetics and process monitoring

Gerhard Franz, Charlotte Hoyler, Josef Kaindl · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 14 citations

Electrical Engineering, Ion Implantation, Engineering +10

Lattice damage in III/V compound semiconductors caused by dry etching

M. Heinbach, Josef Kaindl, Gerhard Franz · Applied Physics Letters · 1995 · 13 citations

Engineering, Electron-beam Lithography, Electron Cyclotron Resonance +18

Performance and reliability of oxide confined VCSELs

T. Wipiejewski, H. D. Wolf, L. Korte et al. · 2003 · 12 citations

Engineering, Optical Transmission System, Vacuum Device +16

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