Yuki Furubayashi

Capacitive MEMS Accelerometer With Perforated and Electrically Separated Mass Structure for Low Noise and Low Power

Y. Kamada, Atsushi Isobe, T. Oshima et al. · Journal of Microelectromechanical Systems · 2019 · 41 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A 22-ng/$\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques

Yuki Furubayashi, T. Oshima, Taizo Yamawaki et al. · IEEE Journal of Solid-State Circuits · 2020 · 38 citations

Engineering, Electrical Engineering, Mechanical Engineering +15

Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers

Atsushi Isobe, Y. Kamada, C. Takubo et al. · IEEE Sensors Journal · 2019 · 15 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16