C. Takubo

Highly selective isotropic gas-phase etching of SiO₂ using HF and methanol at temperatures –30 °C and lower

Takashi Hattori, Hiroyuki Kobayashi, Hideyuki Ohtake et al. · Japanese Journal of Applied Physics · 2023 · 17 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers

Atsushi Isobe, Y. Kamada, C. Takubo et al. · IEEE Sensors Journal · 2019 · 15 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Investigation of Thermal Stability in Multifinger GaInP/GaAs Collector-Up Tunneling–Collector HBTs With Subtransistor Via-Hole Structure

Kenichi Tanaka, Kazuhiro Mochizuki, C. Takubo et al. · IEEE Transactions on Electron Devices · 2006 · 12 citations

Engineering, Electrical Engineering, Materials Science +17

Laterally-driven deformation-robust MEMS gyroscopes with three sets of symmetrically arranged folded-beam suspensions

Munenori Degawa, Hyeryun Jeong, Hisao Sonobe et al. · TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference · 2009 · 10 citations

Engineering, Automotive Engineering, Mechanical Engineering +10