Atsushi Hayashida

Cleaning Technique Using High-Speed Steam-Water Mixed Spray

Masao Watanabe, Toshiyuki Sanada, Atsushi Hayashida et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2009 · 23 citations

Engineering, Chemical Engineering, Semiconductor Devices +16

Predicting the multiaxial fatigue limit and the multiaxial high-cycle fatigue life based on the unified equivalent shear stress from axial strength characteristics with various waveforms

Go Matsubara, Atsushi Hayashida, Daichi Kano · International Journal of Fatigue · 2018 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +16

Post Ion-Implant Photoresist Stripping Using Steam and Water: Pre-Treatment in a Steam Atmosphere and Steam-Water Mixed Spray

Toshiyuki Sanada, Masao Watanabe, Atsushi Hayashida et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2009 · 13 citations

Engineering, Materials Engineering, Microfabrication +13