Concepedia
Statistics
Publications
3
Citations
43
H-Index
Active since
2016
Affiliations
IMEC(Current)
Hitachi High-Tech (Japan)
Hitachi (Japan)
Chuanyu Shao is an author at IMEC specializing in overlay accuracy, etching processes, and semiconductor devices.
Publications per year
2016–2024
Evaluation of the attenuation mechanism of the noise reduction performance of polyurethane porous elastic road surface
Ke Zhong, Chuanyu Shao, Mingzhi Sun et al. · Construction and Building Materials · 2024 · 18 citations
Engineering, Materials Engineering, Materials Science +16
SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM
Kazuhisa Hasumi, Osamu Inoue, Yutaka Okagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 14 citations
Engineering, Electrical Engineering, Materials Science +12
SEM based overlay measurement between resist and buried patterns
Osamu Inoue, Yutaka Okagawa, Kazuhisa Hasumi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 11 citations
Engineering, Manufacturing Engineering, Materials Science +16
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