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Publications
1
Citations
17
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Active since
2009
Affiliations
Applied Materials (United States)(Current)
B. H. Kim is an author at Applied Materials (United States).
Publications per year
2009–2009
Dry etch selectivity of a-C:H hardmasks for sub-65nm patterning applications
Deenesh Padhi, B. H. Kim, Derek Witty · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 17 citations
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