Concepedia

Florian Krüger

FK

Statistics

Publications

3

Citations

103

H-Index

3

Active since

2019

Affiliations

Samsung (South Korea)(Current)

University of Michigan

Florian Krüger is an author at Samsung (South Korea) specializing in applied physics, plasma theory, and engineering.

ORCID

Top concepts

Publications per year

2019–2022

3

Publications

3

Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches

Florian Krüger, Sebastian Wilczek, Thomas Mussenbrock et al. · Plasma Sources Science and Technology · 2019 · 73 citations · Full text

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Electric field reversals resulting from voltage waveform tailoring in Ar/O <sub>2</sub> capacitively coupled plasmas sustained in asymmetric systems

Florian Krüger, Hyunjae Lee, Sang Ki Nam et al. · Plasma Sources Science and Technology · 2021 · 15 citations · Full text

Voltage waveform tailoring for high aspect ratio plasma etching of SiO2 using Ar/CF4/O2 mixtures: Consequences of ion and electron distributions on etch profiles

Florian Krüger, Hyunjae Lee, Sang Ki Nam et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2022 · 15 citations · Full text

, , +18

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