Concepedia

Bencherki Mebarki

BM

Statistics

Publications

4

Citations

129

H-Index

4

Active since

2002

Affiliations

National Institute for Materials Science(Current)

Applied Materials (United States)

Bencherki Mebarki is an author at National Institute for Materials Science specializing in materials engineering, natural sciences, and engineering.

Publications per year

2002–2011

4

Publications

4

Ni based silicides for 45nm CMOS and beyond

A. Lauwers, J. A. Kittl, M.J.H. van Dal et al. · Materials Science and Engineering B · 2004 · 66 citations

Engineering, Computer Engineering, Electrical Engineering +10

Crystallinity and thickness control of well-ordered ultra-thin Al 2 O 3 film on NiAl(1 1 0)

Michiko Yoshitake, Bencherki Mebarki, Thi Thi Lay · Surface Science · 2002 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +15

Temperature effect on growth of well-ordered thin Al2O3 film on NiAl(110)

Thi Thi Lay, Michiko Yoshitake, Bencherki Mebarki · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +15

Innovative self-aligned triple patterning for 1x half pitch using single "spacer deposition-spacer etch" step

Bencherki Mebarki, Hao D. Chen, Yong Mei Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 12 citations

Engineering, Manufacturing Engineering, Materials Engineering +10

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