William J. Keery

Image sharpness measurement in the scanning electron microscope—Part III

Nien Fan Zhang, Michael T. Postek, Robert D. Larrabee et al. · Scanning · 1999 · 56 citations

Arts, Materials Engineering, Digital Imaging +15

The relationship between accelerating voltage and electron detection modes to linewidth measurement in an SEM

Michael T. Postek, William J. Keery, Robert D. Larrabee · Scanning · 1988 · 37 citations

Engineering, Electrical Engineering, Instrumentation +14

Interalaboratory study on the lithographically produced scanning electron microscope magnification standard prototype

Michael T. Postek, AE Vladár, Samuel N. Jones et al. · Journal of Research of the National Institute of Standards and Technology · 1993 · 32 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Low-profile high-efficiency microchannel-plate detector system for scanning electron microscopy applications

Michael T. Postek, William J. Keery, N. V. Frederick · Review of Scientific Instruments · 1990 · 30 citations

Engineering, Biomedical Engineering, Instrumentation +14

X-ray-lithography mask metrology: Use of transmitted electrons in an SEM for linewidth measurement

Michael T. Postek, Jeremiah R. Lowney, AE Vladár et al. · Journal of Research of the National Institute of Standards and Technology · 1993 · 26 citations · Full text

Engineering, Materials Engineering, Materials Science +14