A. B. Sá

Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation

Michel Moisan, C. Barbeau, R. Claude et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 172 citations

Natural Sciences, Electrical Engineering, Physics +15

Modeling of low-pressure microwave discharges in Ar, He, and O/sub 2/: similarity laws for the maintenance field and mean power transfer

C. M. Ferreira, L. L. Alves, Mário J. Pinheiro et al. · IEEE Transactions on Plasma Science · 1991 · 79 citations

Engineering, Electrical Engineering, Physics +17

Self-consistent modeling of surface wave produced discharges at low pressures

A. B. Sá, C. M. Ferreira, S. Pasquiers et al. · Journal of Applied Physics · 1991 · 73 citations

Natural Sciences, Physics, Plasma Physics +16