Concepedia
Statistics
Publications
4
Citations
261
H-Index
Active since
1987
Affiliations
Université de Montréal(Current)
Polytechnique Montréal
Institute of Fluid Flow-Machinery
Polish Academy of Sciences
R. Claude is an author at Université de Montréal specializing in microwave plasmas, physics, and plasma physics.
Publications per year
1987–1991
Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation
Michel Moisan, C. Barbeau, R. Claude et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 172 citations
Natural Sciences, Electrical Engineering, Physics +15
Comparison of microwave and lower-frequency discharges for plasma polymerization
R. Claude, Michel Moisan, M. R. Wertheimer et al. · Plasma Chemistry and Plasma Processing · 1987 · 39 citations
Natural Sciences, Electrical Engineering, Physics +14
Comparison of microwave and lower frequency discharges for plasma polymerization
R. Claude, Michel Moisan, M. R. Wertheimer et al. · Applied Physics Letters · 1987 · 38 citations
Natural Sciences, Materials Science, Physics +15
Effect of frequency from 'low frequency' to microwave on the plasma deposition of thin films
M. R. Wertheimer, M. Moisan, J.E. Klemberg-Sapieha et al. · Pure and Applied Chemistry · 1988 · 12 citations · Full text
Natural Sciences, Electrical Engineering, Physics +10
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