Statistics
Publications
20
Citations
1.6K
H-Index
14
Active since
1978
Peter Seidel is an author at Helmholtz-Zentrum Dresden-Rossendorf specializing in engineering, materials science, and applied physics.
Publications per year
1978–2020
20
20
Thermal and acid-catalyzed deprotection kinetics in candidate deep ultraviolet resist materials
G. M. Wallraff, John M. Hutchinson, William D. Hinsberg et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 69 citations
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