S. Lee

Statistics

Publications

Citations

189

H-Index

Active since

1990

Affiliations

Microelectronics Research Development (United States)(Current)

The University of Texas at Austin

S. Lee is an author at Microelectronics Research Development (United States) specializing in materials science, thin films, and semiconductor materials.

Publications per year

1990–1994

Publications

1 000 000 °C/s thin film electrical heater: In situ resistivity measurements of Al and Ti/Si thin films during ultra rapid thermal annealing

L. H. Allen, Ganpati Ramanath, S. L. Lai et al. · Applied Physics Letters · 1994 · 88 citations

Natural Sciences, Materials Engineering, Materials Science +17

Metal-oxide-semiconductor characteristics of chemical vapor deposited Ta2O5 films

G. Q. Lo, Dim‐Lee Kwong, S. Lee · Applied Physics Letters · 1992 · 64 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Reliability characteristics of metal-oxide-semiconductor capacitors with chemical vapor deposited Ta2O5 gate dielectrics

G. Q. Lo, Dim‐Lee Kwong, S. Lee · Applied Physics Letters · 1993 · 26 citations

Engineering, Electrical Engineering, Materials Science +17

Anomalous capacitance-voltage characteristics of BF2-implanted and rapid thermal annealed p+-polycrystalline silicon gate metal-oxide-semiconductor structures

G. Q. Lo, D. L. Kwong, S. Lee · Applied Physics Letters · 1990 · 11 citations

Engineering, Electrical Engineering, Materials Science +16

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