Concepedia
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Publications
1
Citations
17
H-Index
Active since
2017
Xiao-wei Chang is an author specializing in applied physics, chemical engineering, and thin films.
Top concepts
ChemistryThin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceMicrofabricationChemical EngineeringElectronic MaterialsSurface Modification
Publications per year
2017–2017
Deposition of organosilicone thin film from hexamethyldisiloxane (HMDSO) with 50 kHz/33 MHz dual-frequency atmospheric-pressure plasma jet
Jiao Jiao Li, Qianghua Yuan, Xiao-wei Chang et al. · Plasma Science and Technology · 2017 · 17 citations
Engineering, Thin Film Process Technology, Chemistry +19
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