Alexander B. Shearer

Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition

Josiah Yarbrough, Alexander B. Shearer, Stacey F. Bent · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 110 citations · Full text

Small Molecule Inhibitors, Engineering, Bottom-up Synthesis +24

Area-Selective Atomic Layer Deposition of Al₂O₃ with a Methanesulfonic Acid Inhibitor

Josiah Yarbrough, Fabian Pieck, Alexander B. Shearer et al. · Chemistry of Materials · 2023 · 23 citations

Engineering, Chemistry, Chemical Deposition +18

Molecular Design in Area-Selective Atomic Layer Deposition: Understanding Inhibitors and Precursors

Yujin Lee, Amnon Rothman, Alexander B. Shearer et al. · Chemistry of Materials · 2025 · 12 citations

HfO₂ Area-Selective Atomic Layer Deposition with a Carbon-Free Inhibition Layer

Yujin Lee, Seunggi Seo, Alexander B. Shearer et al. · Chemistry of Materials · 2024 · 11 citations

Achieving 1-nm-Scale Equivalent Oxide Thickness Top-Gate Dielectric on Monolayer Transition Metal Dichalcogenide Transistors With CMOS-Friendly Approaches

Jung-Soo Ko, Alexander B. Shearer, Sol Lee et al. · IEEE Transactions on Electron Devices · 2025 · 11 citations