Concepedia

R. Liu

RL

1

Publications

34

Citations

1

H-Index

2004

Active since

Affiliations

Institute of Microelectronics(Current)

R. Liu is an author at Institute of Microelectronics specializing in engineering, materials engineering, and applied physics.

Top concepts

Publications per year

2004–2004

1

Publications

1

Study of copper diffusion into Ta and TaN barrier materials for MOS devices

S. W. LOH, D.H. Zhang, C.Y. Li et al. · Thin Solid Films · 2004 · 34 citations

, , +9

Rows per page

1–1 of 1