Concepedia

Masanori Akatsuka

MA

12

Publications

292

Citations

12

H-Index

1994

Active since

Affiliations

Sumitomo Electric Industries (Japan)(Current)

Sumco Corporation (Japan)

The University of Osaka

Okayama Prefectural University

Mitsubishi Group (Japan)

Masanori Akatsuka is an author at Sumitomo Electric Industries (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1994–2003

12

Publications

12

Effect of Rapid Thermal Annealing on Oxygen Precipitation Behavior in Silicon Wafers

Masanori Akatsuka, Masahiko Okui, Nobuyuki Morimoto et al. · Japanese Journal of Applied Physics · 2001 · 50 citations

, , +15

Effect of Heavy Boron Doping on Oxygen Precipitation in Czochralski Silicon Substrates of Epitaxial Wafers

Koji Sueoka, Masanori Akatsuka, Mitsuharu Yonemura et al. · Journal of The Electrochemical Society · 2000 · 32 citations

, , +14

Pinning Effect of Punched-Out Dislocations in Carbon-, Nitrogen- or Boron-Doped Silicon Wafers

Masanori Akatsuka, Koji Sueoka · Japanese Journal of Applied Physics · 2001 · 31 citations

, , +14

Dependence of Mechanical Strength of Czochralski Silicon Wafers on the Temperature of Oxygen Precipitation Annealing

Koji Sueoka, Masanori Akatsuka, Hisashi Katahama et al. · Journal of The Electrochemical Society · 1997 · 30 citations

, , +15

Computer Simulation for Morphology, Size, and Density of Oxide Precipitates in CZ Silicon

Koji Sueoka, Masanori Akatsuka, Masahiko Okui et al. · Journal of The Electrochemical Society · 2003 · 26 citations

, , +19

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