Masanori Akatsuka

Effect of Rapid Thermal Annealing on Oxygen Precipitation Behavior in Silicon Wafers

Masanori Akatsuka, Masahiko Okui, Nobuyuki Morimoto et al. · Japanese Journal of Applied Physics · 2001 · 50 citations

Materials Science, Silicon Wafers, Engineering +15

Effect of Heavy Boron Doping on Oxygen Precipitation in Czochralski Silicon Substrates of Epitaxial Wafers

Koji Sueoka, Masanori Akatsuka, Mitsuharu Yonemura et al. · Journal of The Electrochemical Society · 2000 · 32 citations

Materials Science, Semiconductors, Chemical Engineering +14

Pinning Effect of Punched-Out Dislocations in Carbon-, Nitrogen- or Boron-Doped Silicon Wafers

Masanori Akatsuka, Koji Sueoka · Japanese Journal of Applied Physics · 2001 · 31 citations

Materials Science, Materials Engineering, Engineering +14

Dependence of Mechanical Strength of Czochralski Silicon Wafers on the Temperature of Oxygen Precipitation Annealing

Koji Sueoka, Masanori Akatsuka, Hisashi Katahama et al. · Journal of The Electrochemical Society · 1997 · 30 citations

Materials Science, Materials Engineering, Slip Dislocation +15

Computer Simulation for Morphology, Size, and Density of Oxide Precipitates in CZ Silicon

Koji Sueoka, Masanori Akatsuka, Masahiko Okui et al. · Journal of The Electrochemical Society · 2003 · 26 citations

Engineering, Crystal Growth Technology, Oxygen Precipitation +19