Statistics
Publications
33
Citations
950
H-Index
18
Active since
1993
Zhuan Liu is an author at Lanzhou University specializing in natural sciences, chemistry, and spectroscopy.
Publications per year
1993–2025
33
33
Device based in-chip critical dimension and overlay metrology
Young‐Nam Kim, Jong-Sun Paek, Silvio Rabello et al. · Optics Express · 2009 · 50 citations · Full text
Engineering, Electrical Engineering, Manufacturing Engineering +17
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