Statistics
Publications
1
Citations
48
H-Index
1
Active since
2009
Affiliations
Nanosys (United States)(Current)
Jong-Sun Paek is an author at Nanosys (United States) specializing in electronic packaging, industrial inspection, and calibration.
Publications per year
2009–2009
1
1
Device based in-chip critical dimension and overlay metrology
Young‐Nam Kim, Jong-Sun Paek, Silvio Rabello et al. · Optics Express · 2009 · 48 citations · Full text
Engineering, Measurement, Microscopy +24
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