Statistics
Publications
3
Citations
153
H-Index
3
Active since
1986
Affiliations
Richard J. Markle is an author at Advanced Micro Devices (United States) specializing in chemistry, plasma diagnostics, and natural sciences.
Publications per year
1986–2000
3
3
A plasma process monitor/control system
Joel O. Stevenson, P.P. Ward, Michael L. Smith et al. · Surface and Interface Analysis · 1998 · 28 citations · Full text
Engineering, Manufacturing Engineering, Systems Engineering +17
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