Statistics
Publications
1
Citations
28
H-Index
1
Active since
1998
Affiliations
P.P. Ward is an author at Advanced Micro Devices (United States) specializing in plasma processes, thin-film growth kinetics, and process instrumentation.
Publications per year
1998–1998
1
1
A plasma process monitor/control system
Joel O. Stevenson, P.P. Ward, Michael L. Smith et al. · Surface and Interface Analysis · 1998 · 28 citations · Full text
Engineering, Manufacturing Engineering, Systems Engineering +17
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