Concepedia

M. Hackenberg

MH

Statistics

Publications

3

Citations

61

H-Index

3

Active since

2012

Affiliations

Schott (Germany)(Current)

Institute for Microelectronics and Microsystems

Fraunhofer Institute for Integrated Systems and Device Technology

Friedrich-Alexander-Universität Erlangen-Nürnberg

M. Hackenberg is an author at Schott (Germany) specializing in materials science, laser annealing, and laser physics.

Publications per year

2012–2013

3

Publications

3

Anomalous Impurity Segregation and Local Bonding Fluctuation in<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>l</mml:mi></mml:math>-Si

Giuseppe Fisicaro, Karim Huet, R. Negru et al. · Physical Review Letters · 2013 · 36 citations · Full text

, , +17

Enthalpy based modeling of pulsed excimer laser annealing for process simulation

M. Hackenberg, P. Pichler, Karim Huet et al. · Applied Surface Science · 2012 · 13 citations · Full text

, , +12

Modeling boron profiles in silicon after pulsed excimer laser annealing

M. Hackenberg, Karim Huet, R. Negru et al. · AIP conference proceedings · 2012 · 12 citations · Full text

, , +17

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