Concepedia

Alvina M. Williams

AM

Statistics

Publications

3

Citations

42

H-Index

3

Active since

2003

Affiliations

Carl Zeiss (Germany)(Current)

Alvina M. Williams is an author at Carl Zeiss (Germany) specializing in engineering, applied physics, and optical properties.

Top concepts

EngineeringApplied PhysicsOptical MaterialsOptical PropertiesOptoelectronicsMaterial SciencePolymersChemistryCalibrationOphthalmology

Publications per year

2003–2007

3

Publications

3

First results for hyper NA scanner emulation from AIMS 45-193i

Axel M. Zibold, Norbert Rosenkranz, Andrew Ridley et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 17 citations

Optical Materials, Engineering, Optic Design +20

Novel high-index resists for 193-nm immersion lithography and beyond

Idriss Blakey, Lan Chen, Bronwin Dargaville et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 15 citations

Optical Materials, Engineering, Electron-beam Lithography +22

Testing new chemistries for mask repair with focused ion beam gas assisted etching

Andrei Stanishevsky, Klaus Edinger, Jon Orloff et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 10 citations

Materials Science, Optical Materials, Engineering +12

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