Rachel A. Nye

Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis

Rachel A. Nye, Andrew P. Kelliher, John T. Gaskins et al. · Chemistry of Materials · 2020 · 22 citations

Optical Materials, Engineering, Surface Nanotechnology +22

Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions

Kaat Van Dongen, Rachel A. Nye, Jan‐Willem J. Clerix et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2023 · 19 citations · Full text

Engineering, New Applications, Chemistry +19

Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

Rachel A. Nye, Seung Keun Song, Kaat Van Dongen et al. · Applied Physics Letters · 2022 · 17 citations · Full text

Engineering, Chemistry, Chemical Deposition +17

Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

Rachel A. Nye, Kaat Van Dongen, Danilo De Simone et al. · Chemistry of Materials · 2023 · 13 citations · Full text

Optical Materials, Engineering, Electron-beam Lithography +23

<i>In situ</i> analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors

Rachel A. Nye, Siyao Wang, Stefan Uhlenbrock et al. · Dalton Transactions · 2021 · 12 citations