Kaat Van Dongen

Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion

Fabio Grillo, Job Soethoudt, Esteban A. Marques et al. · Chemistry of Materials · 2020 · 49 citations · Full text

Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions

Kaat Van Dongen, Rachel A. Nye, Jan‐Willem J. Clerix et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2023 · 19 citations · Full text

Engineering, New Applications, Chemistry +19

Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

Rachel A. Nye, Seung Keun Song, Kaat Van Dongen et al. · Applied Physics Letters · 2022 · 17 citations · Full text

Engineering, Chemistry, Chemical Deposition +17

Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

Rachel A. Nye, Kaat Van Dongen, Danilo De Simone et al. · Chemistry of Materials · 2023 · 13 citations · Full text

Optical Materials, Engineering, Electron-beam Lithography +23