Concepedia

Kechun Ma

KM

8

Publications

149

Citations

8

H-Index

2012

Active since

Affiliations

University of Twente(Current)

Technical University of Denmark

Kechun Ma is an author at University of Twente specializing in engineering, mechanical engineering, and biomedical engineering.

ORCID

Top concepts

Publications per year

2012–2023

8

Publications

8

New type of microengine using internal combustion of hydrogen and oxygen

V. B. Svetovoy, Remco G.P. Sanders, Kechun Ma · Scientific Reports · 2014 · 34 citations · Full text

The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF <sub>6</sub> /O <sub>2</sub> Cycles with Excellent 3D Profile Control at Room Temperature

Vy Thi Hoang Nguyen, Chantal Silvestre, Peixiong Shi et al. · ECS Journal of Solid State Science and Technology · 2020 · 26 citations · Full text

Carbon emission responsibility accounting in renewable energy-integrated DC traction power systems

Zhanhe Li, Xiaoqian Li, Chao Lü et al. · Applied Energy · 2023 · 21 citations

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A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing

Ilia V. Uvarov, Pavel S. Shlepakov, Artem E. Melenev et al. · Actuators · 2021 · 16 citations · Full text

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Cr and CrOx etching using SF6 and O2 plasma

Vy Thi Hoang Nguyen, Flemming Jensen, Jörg Hübner et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2021 · 15 citations · Full text

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