Concepedia

Vy Thi Hoang Nguyen

VT

7

Publications

226

Citations

7

H-Index

2000

Active since

Affiliations

Technical University of Denmark(Current)

University of Twente

Ørsted (Denmark)

Vy Thi Hoang Nguyen is an author at Technical University of Denmark specializing in engineering, applied physics, and microfabrication.

ORCID

Top concepts

Publications per year

2000–2022

7

Publications

7

Nanometer-scale photon confinement in topology-optimized dielectric cavities

Marcus Albrechtsen, Babak Vosoughi Lahijani, Rasmus E. Christiansen et al. · Nature Communications · 2022 · 112 citations · Full text

The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF <sub>6</sub> /O <sub>2</sub> Cycles with Excellent 3D Profile Control at Room Temperature

Vy Thi Hoang Nguyen, Chantal Silvestre, Peixiong Shi et al. · ECS Journal of Solid State Science and Technology · 2020 · 26 citations · Full text

On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand

Vy Thi Hoang Nguyen, Flemming Jensen, Jörg Hübner et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 23 citations · Full text

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Ultrahigh aspect ratio etching of silicon in SF6-O2 plasma: The clear-oxidize-remove-etch (CORE) sequence and chromium mask

Vy Thi Hoang Nguyen, Evgeniy Shkondin, Flemming Jensen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 22 citations · Full text

, , +16

Cr and CrOx etching using SF6 and O2 plasma

Vy Thi Hoang Nguyen, Flemming Jensen, Jörg Hübner et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2021 · 15 citations · Full text

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