Robert L. Rhoades

Chemical Mechanical Planarization Historical Review and Future Direction

Gautam Banerjee, Robert L. Rhoades · ECS Transactions · 2008 · 57 citations

Engineering, Industrial Engineering, Mechanical Engineering +21

Nanoindentation and Nanoscratching of Hard Coating Materials for Magnetic Disks

Ting Y. Tsui, George M. Pharr, W. C. Oliver et al. · MRS Proceedings · 1994 · 42 citations

Materials Science, Magnetism, Engineering +8

Cu metallization using a permanent magnet electron cyclotron resonance microwave plasma/sputtering hybrid system

S. M. Gorbatkin, D. B. Poker, Robert L. Rhoades et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 37 citations

Engineering, Plasma Science, Magnetism +17

Integrated process for defect-free copper plating and chemical-mechanical polishing of through-silicon vias for 3D interconnects

Dean Malta, Christopher W. Gregory, D. Temple et al. · 2010 · 35 citations

Chemical-mechanical Polishing, Engineering, Defect-free Copper Plating +21

Hard boron oxide thin-film deposition using electron cyclotron resonance microwave plasmas

S. M. Gorbatkin, Robert L. Rhoades, Ting Y. Tsui et al. · Applied Physics Letters · 1994 · 31 citations

Materials Engineering, Materials Science, Boron Downstream +14