Robert L. Rhoades - Concepedia

Author

Robert L. Rhoades

Oak Ridge National Laboratory

Also Known As

R. L. Rhoades, R. Rhoades, R. V. Rhoades, R.L. Rhoades, Robert L. Rhoades, Robert Rhoades

Publications

272

Citations

H-Index

Concepts

All Affiliations

Oak Ridge National Laboratory

About

Robert L. Rhoades is an author at Oak Ridge National Laboratory specializing in engineering, applied physics, and materials science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	7	7	234
2	Applied Physics	7	7	234
3	Electrical Engineering	3	3	129
4	Natural Sciences	1	1	14
5	Industrial Engineering	1	1	57

Robert L. Rhoades

Publications

234

Citations

H-Index

Page 1

	Year	Citations
Chemical Mechanical Planarization Historical Review and Future Direction Gautam Banerjee, Robert L. Rhoades ECS Transactions EngineeringIndustrial EngineeringMechanical EngineeringInterconnect (Integrated Circuits)Wafer Scale Processing	2008	57
Nanoindentation and Nanoscratching of Hard Coating Materials for Magnetic Disks Ting Y. Tsui, George M. Pharr, W. C. Oliver, MRS Proceedings Materials ScienceMagnetismEngineeringNanomaterialsNanotechnology	1994	42
Cu metallization using a permanent magnet electron cyclotron resonance microwave plasma/sputtering hybrid system S. M. Gorbatkin, D. B. Poker, Robert L. Rhoades, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringPlasma ScienceMagnetismPlasma ElectronicsMetallic Functional Material	1996	37
Integrated process for defect-free copper plating and chemical-mechanical polishing of through-silicon vias for 3D interconnects Dean Malta, Christopher W. Gregory, D. Temple, Chemical-mechanical PolishingEngineeringDefect-free Copper PlatingSilicon ViasIntegrated Circuits	2010	35
Hard boron oxide thin-film deposition using electron cyclotron resonance microwave plasmas S. M. Gorbatkin, Robert L. Rhoades, Ting Y. Tsui, Applied Physics Letters Materials EngineeringMaterials ScienceBoron DownstreamPure BoronEngineering	1994	31
Short pulse electron beam excitation of the high-pressure atomic Ne laser Jong W. Shon, Robert L. Rhoades, J. T. Verdeyen, Journal of Applied Physics Optical PumpingPhotonicsFree-electron LasersEngineeringLaser Pumping	1993	18
Characterization of Ar/Cu electron-cyclotron-resonance plasmas using optical emission spectroscopy Robert L. Rhoades, S. M. Gorbatkin Journal of Applied Physics EngineeringPhysicsElectron SpectroscopyNatural SciencesSpectroscopy	1996	14

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