Virginia R. Anderson

Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al₂O₃ Atomic Layer Deposition

Byoung H. Lee, Byunghoon Yoon, Virginia R. Anderson et al. · The Journal of Physical Chemistry C · 2012 · 132 citations

Natural Sciences, Materials Engineering, Materials Science +16

Molecular Layer Deposition of Zircone and ZrO₂/Zircone Alloy Films: Growth and Properties

Byoung H. Lee, Virginia R. Anderson, Steven M. George · Chemical Vapor Deposition · 2013 · 68 citations

Natural Sciences, Materials Engineering, Materials Science +16

Growth and Properties of Hafnicone and HfO₂/Hafnicone Nanolaminate and Alloy Films Using Molecular Layer Deposition Techniques

Byoung H. Lee, Virginia R. Anderson, Steven M. George · ACS Applied Materials & Interfaces · 2014 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +14

Molybdenum Atomic Layer Deposition Using MoF₆ and Si₂H₆ as the Reactants

Dragos Seghete, G. B. Rayner, Andrew S. Cavanagh et al. · Chemistry of Materials · 2011 · 52 citations

Natural Sciences, Chemistry, Materials Science +14

Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures

Neeraj Nepal, Virginia R. Anderson, Jennifer K. Hite · Thin Solid Films · 2015 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +16