Concepedia

Qinzhi Xu

QX

21

Publications

422

Citations

14

H-Index

2009

Active since

Affiliations

Chinese Academy of Sciences(Current)

Institute of Microelectronics

Beijing University of Chemical Technology

University of Chinese Academy of Sciences

Qinzhi Xu is an author at Chinese Academy of Sciences specializing in engineering, materials science, and mechanical engineering.

Top concepts

EngineeringMaterial ScienceMechanical EngineeringMicrostructureMicroelectronicsChemical EngineeringMaterials EngineeringCorrosionSurface ScienceMaterial Processing

Publications per year

2009–2024

21

Publications

21

Influence of slurry components on copper CMP performance in alkaline slurry

Qinzhi Xu, Lan Chen, Fei Yang et al. · Microelectronic Engineering · 2017 · 66 citations

Materials Science, Sewage Sludge Treatment, Chemical Engineering +9

A chemical mechanical planarization model for aluminum gate structures

Qinzhi Xu, Lan Chen, Jingjing Fang et al. · Microelectronic Engineering · 2014 · 29 citations

Materials Engineering, Device Modeling, Engineering +6

A Material Removal Rate Model for Aluminum Gate Chemical Mechanical Planarization

Qinzhi Xu, Lan Chen · ECS Journal of Solid State Science and Technology · 2015 · 24 citations · Full text

Materials Science, Materials Engineering, Chemical Engineering +12

An Aluminum Gate Chemical Mechanical Planarization Model for HKMG Process Incorporating Chemical and Mechanical Effects

Qinzhi Xu, Lan Chen · ECS Journal of Solid State Science and Technology · 2014 · 24 citations

Engineering, Industrial Engineering, Mechanical Engineering +17

Equivalent thermal model of through silicon via and bump for advanced packaging of integrated circuits

Chuanjun Nie, Qinzhi Xu, Lan Chen · Microelectronics Reliability · 2022 · 23 citations

Advanced Packaging, 3D Ic Architecture, Electrical Engineering +11

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